![[AIP AIP Conference Proceedings Volume 122 - ()] AIP Conference Proceedings - Dependence of Si-SiO2 interface structures on crystal orientation and oxidation conditions]()
[AIP AIP Conference Proceedings Volume 122 - ()] AIP Conference Proceedings - Dependence of Si-SiO2 interface structures on crystal orientation and oxidation conditionsHattori, Takeo; Muto, Masaaki; Suzuki, Toshihisa; Yamabe, Kikuo; Yamauchi, Hiroshi · 1984