![[IEEE 2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF) - Lausanne, Switzerland (2019.7.14-2019.7.19)] 2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF) - Vibrating Piezoelectric Energy Conversion Efficiency of Sol-Gel PZT Films with Various Crystal Orientations on MEMS Buckled Diaphragm Structures]()
[IEEE 2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF) - Lausanne, Switzerland (2019.7.14-2019.7.19)] 2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF) - Vibrating Piezoelectric Energy Conversion Efficiency of Sol-Gel PZT Films with Various Crystal Orientations on MEMS Buckled Diaphragm StructuresYamashita, Kaoru; Nakajima, Shota; Shiomi, Jo; Noda, Minoru; Muralt, Paul · 2019
