![Observation of silicon front surface topographs of an ultralarge-scale-integrated wafer by synchrotron x-ray plane wave]()
Observation of silicon front surface topographs of an ultralarge-scale-integrated wafer by synchrotron x-ray plane waveSuzuki, Yoshifumi; Tsukasaki, Yoshimitsu; Kajiwara, Kentaro; Kawado, Seiji; Iida, Satoshi; Chikaura, Yoshinori · Journal of Applied Physics · 2004