![SPIE Proceedings [SPIE SPIE BiOS - San Francisco, California, United States (Saturday 1 February 2014)] Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI - Focused beam scatterometry for deep subwavelength metrology]()
SPIE Proceedings [SPIE SPIE BiOS - San Francisco, California, United States (Saturday 1 February 2014)] Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI - Focused beam scatterometry for deep subwavelength metrologyBrown, Thomas G.; Cogswell, Carol J.; Wilson, Tony; Brown, Thomas G.; Alonso, Miguel A.; Vella, Anthony; Theisen, Michael J.; Head, Stephen T.; Gillmer, Steven R.; Ellis, Jonathan D. · 2014