![Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning]()
Resonant biaxial 7-mm MEMS mirror for omnidirectional scanningHofmann, Ulrich; Aikio, Mika; Janes, Joachim; Senger, Frank; Stenchly, Vanessa; Hagge, Juergen; Quenzer, Hans-Joachim; Weiss, Manfred; von Wantoch, Thomas; Mallas, Christian; Wagner, Bernhard; Benecke, Wolfgang · Journal of Micro/Nanolithography, MEMS, and MOEMS · 2013