![Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm]()
Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µmBrand, Uwe; Xu, Min; Doering, Lutz; Langfahl-Klabes, Jannick; Behle, Heinrich; Bütefisch, Sebastian; Ahbe, Thomas; Peiner, Erwin; Völlmeke, Stefan; Frank, Thomas; Mickan, Bodo; Kiselev, Ilia; Hauptmannl, Michael; Drexel, Michael · Sensors · 2019