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Electrical characterization of zirconium silicate films obtained from novel MOCVD precursorsAlbena Paskaleva; Martin Lemberger; Stefan Zürcher; Anton J. Bauer; Lothar Frey; Heiner Ryssel · 2003
Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursorsM Lemberger; A Paskaleva; S Zürcher; A.J Bauer; L Frey; H Ryssel · 2004