SPIE Proceedings [SPIE 1994 International Symposium on Optical Interference Coatings - Grenoble, France (Sunday 5 June 1994)] Optical Interference Coatings - <title>Deposition and characterization of a-SiC:H thin films</title>Demichelis, Francesca; Pirri, C. F.; Tresso, E.; Valente, F.; Bolzan, E.; Rigato, Valentino; Abeles, Florin · 1994