The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and Steam
- 期刊名称Journal of The Electrochemical Society
- 作者Deal, Bruce E.
- 卷第110卷
- 期第6期
- 印刷ISSN0013-4651
- 文件大小752.42KB
- 发表时间1963
- DOI10.1149/1.2425807
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