![Performance Evaluation of Cleaning Solutions Enhanced with Tetraalkylammonium Hydroxide Substituents for Post-CMP Cleaning on Poly-Si Film]()
Performance Evaluation of Cleaning Solutions Enhanced with Tetraalkylammonium Hydroxide Substituents for Post-CMP Cleaning on Poly-Si FilmPan, Tung Ming; Lei, Tan Fu; Ko, Fu Hsiang; Chao, Tien Sheng; Liaw, Ming Chi; Lee, Ying Hao; Lu, Chih Peng · Journal of The Electrochemical Society · 2002