Calculations of Impurity Atom Diffusion Through a Narrow Diffusion Mask Opening
- 期刊名称IBM Journal of Research and Development
- 作者Kennedy, D. P.; Murley, P. C.
- 卷第10卷
- 期第1期
- 印刷ISSN0018-8646
- 电子ISSN0018-8646
- 文件大小434.52KB
- 发表时间1966-01
- DOI10.1147/rd.101.0006
- 页码6-12
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