Effects of Light and Temperature on the Growth of Silicon Stain Films
Koizumi, Haruhiko; Sato, Shuichi; Kawaji, Shinji
- 期刊名称Japanese Journal of Applied Physics
- 作者Koizumi, Haruhiko; Sato, Shuichi; Kawaji, Shinji
- 卷第6卷
- 期第5期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小1898.55KB
- 发表时间1967-5
- DOI10.1143/JJAP.6.657
- 页码657-658