Low-Temperature Silicon Epitaxy
- 期刊名称Journal of The Electrochemical Society
- 作者Frieser, R. G.
- 卷第115卷
- 期第4期
- 印刷ISSN0013-4651
- 文件大小744.93KB
- 发表时间1968
- DOI10.1149/1.2411228
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