Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
- 作者Sigmund, Peter
- 卷第184卷
- 期第2期
- 印刷ISSN0031-899X
- 电子ISSN1536-6065
- 文件大小3803.24KB
- 发表时间1969
- DOI10.1103/physrev.184.383
- 页码383-416
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