Silicon nitride as a mask in indium-diffusion
- 作者I. Fränz; W. Langheinrich
- 卷第12卷
- 期第1期
- 印刷ISSN0038-1101
- 文件大小25.76KB
- 发表时间1969
- DOI10.1016/0038-1101(69)90137-3
- 页码63-64
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