Precision Electron Beam Microfabrication
- 期刊名称Journal of Vacuum Science and Technology
- 作者Ozdemir, F. S.; Perkins, W. E.; Yim, R.; Wolf, E. D.
- 卷第10卷
- 期第6期
- 印刷ISSN0022-5355
- 文件大小1852.86KB
- 发表时间1973-11
- DOI10.1116/1.1318454
- 页码1008-1011
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