Comparison of backscattering spectrometry and secondary ion mass spectrometry by analysis of tantalum pentoxide layers
- 期刊名称Analytical Chemistry
- 作者Chu, W. K.; Nicolet, M. A.; Mayer, J. W.; Evans, C. A.
- 卷第46卷
- 期第14期
- 印刷ISSN0003-2700
- 电子ISSN1520-6882
- 文件大小698.20KB
- 发表时间1974-12
- DOI10.1021/ac60350a039
- 页码2136-2141
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