Electron-beam-delineated X-band silicon transistor
- 期刊名称Journal of Vacuum Science and Technology
- 作者Kruger, James B.
- 卷第12卷
- 期第6期
- 印刷ISSN0022-5355
- 文件大小1107.76KB
- 发表时间1975-11
- DOI10.1116/1.568522
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