A pneumatic logic interface for valve throttling
- 期刊名称Journal of Vacuum Science and Technology
- 作者Hugenberger, Charles E.
- 卷第12卷
- 期第1期
- 印刷ISSN0022-5355
- 文件大小608.01KB
- 发表时间1975-1
- DOI10.1116/1.568608
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