Target thickness uniformity gauge
- 作者R. Liljestrand; G. Blanpied; G.W. Hoffmann; J.E. Spencer; J.R. Rhodes
- 卷第138卷
- 期第3期
- 印刷ISSN0029-554X
- 文件大小508.19KB
- 发表时间1976
- DOI10.1016/0029-554x(76)90313-x
- 页码471-477
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