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A study of silicon oxides prepared by oxygen implantation into silicon

A study of silicon oxides prepared by oxygen implantation into silicon

M. H. Badawi; K. V. Anand

作者M. H. Badawi; K. V. Anand
文件大小850.95KB
发表时间1977
DOI10.1088/0022-3727/10/14/009

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