![SPIE Proceedings [SPIE SPIE Nanoscience + Engineering - San Diego, California, United States (Sunday 28 August 2016)] Nanophotonic Materials XIII - Plasma-enhanced atomic layer deposition for plasmonic TiN]()
SPIE Proceedings [SPIE SPIE Nanoscience + Engineering - San Diego, California, United States (Sunday 28 August 2016)] Nanophotonic Materials XIII - Plasma-enhanced atomic layer deposition for plasmonic TiNCabrini, Stefano; Lérondel, Gilles; Schwartzberg, Adam M.; Mokari, Taleb; Otto, Lauren M.; Hammack, Aaron T.; Aloni, Shaul; Ogletree, D. Frank; Olynick, Deirdre L.; Dhuey, Scott; Stadler, Bethanie J. H.; Schwartzberg, Adam M. · 2016