Ion beam annealing of semiconductors
- 作者R. T. Hodgson; J. E. E. Baglin; R. Pal; J. M. Neri; D. A. Hammer
- 卷第37卷
- 期第2期
- 文件大小470.31KB
- 发表时间1980
- DOI10.1063/1.91819
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