New design of modulated Bayard–Alpert gauge
- 期刊名称Journal of Vacuum Science and Technology
- 作者Hua, Z. Y.
- 卷第17卷
- 期第1期
- 印刷ISSN0022-5355
- 文件大小669.57KB
- 发表时间1980-1
- DOI10.1116/1.570385
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