Deposition and Etching of Thin Films by Means of Beam Plasma Discharge with Tube-Like Electron Beam

V. M. Atamanov; G. B. Levadny; A. A. Ivanov; S. Klagge; M. Maass; Y. F. Nasedkin; U. V. Sereda; A. A. Serov; N. N. Timchenko

作者V. M. Atamanov; G. B. Levadny; A. A. Ivanov; S. Klagge; M. Maass; Y. F. Nasedkin; U. V. Sereda; A. A. Serov; N. N. Timchenko
卷第22卷
期第5期
印刷ISSN0863-1042
电子ISSN1521-3986
文件大小446.65KB
发表时间1982
DOI10.1002/ctpp.19820220505
页码427-434

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