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Properties of Chemically Vapor-Deposited Amorphous SiN
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Alloys

Properties of Chemically Vapor-Deposited Amorphous SiN _x Alloys

Sasaki, Goro; Kondo, Makoto; Fujita, Shizuo; Sasaki, Akio

期刊名称Japanese Journal of Applied Physics
作者Sasaki, Goro; Kondo, Makoto; Fujita, Shizuo; Sasaki, Akio
卷第21卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小843.05KB
发表时间1982-10-20
DOI10.1143/JJAP.21.1394
页码1394-1399

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