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Defect engineering as an important factor in developing VLSI substrates

Defect engineering as an important factor in developing VLSI substrates

H. Richter; M. Mai; F-G. Kirscht; P. Gaworzewski

作者H. Richter; M. Mai; F-G. Kirscht; P. Gaworzewski
卷第116卷
印刷ISSN0378-4363
文件大小510.91KB
发表时间1983
DOI10.1016/0378-4363(83)90243-7
页码162-167

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