Numerical considerations on multipole-type electrostatic deflectors
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Idesawa, M.
- 卷第1卷
- 期第4期
- 印刷ISSN0734-211X
- 文件大小730.45KB
- 发表时间1983
- DOI10.1116/1.582738
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