DC magnetron glow discharge amorphous silicon
- 作者G.B. Smith; D.R. McKenzie
- 卷第11卷
- 印刷ISSN0165-1633
- 文件大小588.08KB
- 发表时间1984
- DOI10.1016/0165-1633(84)90027-3
- 页码45-56
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