Hydrostatic float polishing for wafer preparation
- 期刊名称Review of Scientific Instruments
- 作者Hamaguchi, Tsuneo; Kimura, Masakazu; Egami, Koji; Endo, Nobuhiro
- 卷第55卷
- 期第11期
- 印刷ISSN0034-6748
- 文件大小398.25KB
- 发表时间1984
- DOI10.1063/1.1137641
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