The comparison of two absolute layer thickness gauges
- 期刊名称Journal of Physics E: Scientific Instruments
- 作者Jongeling, T J M; Heerens, W C
- 卷第17卷
- 期第8期
- 印刷ISSN0022-3735
- 文件大小540.60KB
- 发表时间1984-08
- DOI10.1088/0022-3735/17/8/010
- 页码664-668
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