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Pressure Dependence of Arsenic Diffusivity in Silicon

Nygren, Eric; Aziz, Michael J.; Turnbull, David; Hays, James F.; Poate, John M.; Jacobson, Dale C.; Hull, Robert

期刊名称MRS Proceedings
作者Nygren, Eric; Aziz, Michael J.; Turnbull, David; Hays, James F.; Poate, John M.; Jacobson, Dale C.; Hull, Robert
卷第36卷
电子ISSN1946-4274
文件大小782.95KB
发表时间1984-1
DOI10.1557/proc-36-77