SPIE Proceedings [SPIE 1984 Los Angeles Techincal Symposium - Los Angeles (Tuesday 24 January 1984)] Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials - Oxidation Of Singular And Vicinal Surfaces Of Silicon: The Structure Of Si-Si0<formula><inf><roman>2</roman></inf></formula> Interface
Mazur, J. H.; Gronsky, R.; Washburn, J.; Lampert, Carl M.; Sadana, Devindra K.
- 作者Mazur, J. H.; Gronsky, R.; Washburn, J.; Lampert, Carl M.; Sadana, Devindra K.
- 卷第463卷
- 印刷ISSN0277-786X
- 文件大小7526.96KB
- 发表时间1984
- DOI10.1117/12.941353
- 页码88-92