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Microwave plasma oxidation of silicon

C. Y. Fu; J. C. Mikkelsen; J. Schmitt; J. Abelson; J. C. Knights; N. Johnson; A. Barker; M. J. Thompson

作者C. Y. Fu; J. C. Mikkelsen; J. Schmitt; J. Abelson; J. C. Knights; N. Johnson; A. Barker; M. J. Thompson
卷第14卷
期第6期
印刷ISSN0361-5235
电子ISSN1543-186X
文件大小962.79KB
发表时间1985
DOI10.1007/bf02654306
页码685-706