Excimer laser-induced chemical vapor deposition of titanium silicide
- 期刊名称Journal of Applied Physics
- 作者Gupta, A.; West, G. A.; Beeson, K. W.
- 卷第58卷
- 期第9期
- 印刷ISSN0021-8979
- 文件大小1068.40KB
- 发表时间1985
- DOI10.1063/1.335733
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