Pressure dependence of arsenic diffusivity in silicon
Nygren, Eric; Aziz, Michael J.; Turnbull, David; Poate, John M.; Jacobson, Dale C.; Hull, Robert
- 期刊名称Applied Physics Letters
- 作者Nygren, Eric; Aziz, Michael J.; Turnbull, David; Poate, John M.; Jacobson, Dale C.; Hull, Robert
- 卷第47卷
- 期第2期
- 印刷ISSN0003-6951
- 文件大小436.96KB
- 发表时间1985
- DOI10.1063/1.96283