Electrical Conduction of Poly-P-Xylylene Thin Films on Si
- 期刊名称Japanese Journal of Applied Physics
- 作者Takai, Yoshiaki; Mori, Tatsuo; Hayase, Yoshihiko; Mizutani, Teruyoshi; Ieda, Masayuki
- 卷第24卷
- 印刷ISSN0021-4922
- 文件大小240.82KB
- 发表时间1985-5-20
- DOI10.1143/JJAP.24.L347
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