PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF TITANIUM SULFIDES
- 期刊名称Chemistry Letters
- 作者Shimanouchi, Rie; Yamamoto, Takanori; Kikkawa, Shinichi; Koizumi, Mitsue
- 卷第14卷
- 期第9期
- 印刷ISSN0366-7022
- 电子ISSN1348-0715
- 文件大小6440.78KB
- 发表时间1985-09-05
- DOI10.1246/cl.1985.1323
- 页码1323-1326
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