Rapid thermal annealing and titanium silicide formation
- 作者D. Levy; J. P. Ponpon; A. Grob; J. J. Grob; R. Stuck
- 卷第38卷
- 期第1期
- 印刷ISSN0947-8396
- 电子ISSN1432-0630
- 文件大小892.14KB
- 发表时间1985-09
- DOI10.1007/bf00618722
- 页码23-29
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