Preparation of tungsten carbide and tungsten nitride by CVD method using fluoride.
- 期刊名称NIPPON KAGAKU KAISHI
- 作者WATANABE, Nobuatsu; TERADA, Tsuyoshi; CHONG, Yong-bo; NAKAJIMA, Tsuyoshi
- 期第10期
- 印刷ISSN0369-4577
- 电子ISSN2185-0925
- 文件大小4441.94KB
- 发表时间1985
- DOI10.1246/nikkashi.1985.1812
- 页码1812-1820
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