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Advances in resist technology and processing II. Proceedings of SPIE – The international society for optical engineering. Vol. 539. LARRY F. THOMPSON, Editor. ISBN 0-89252-574-6. Bellingham, Washington: SPIE 1985. VI, 350 S., $ 61.00

G. Reinisch

作者G. Reinisch
卷第37卷
印刷ISSN0323-7648
电子ISSN1521-4044
文件大小187.53KB
发表时间1986
DOI10.1002/actp.1986.010371125
页码745-745

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Advances in resist technology and processing II. Proceedings of SPIE – The international society for optical engineering. Vol. 539. LARRY F. THOMPSON, Editor. ISBN 0-89252-574-6. Bellingham, Washington: SPIE 1985. VI, 350 S., $ 61.00