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Evidence of a charge induced contribution to the sputtering yield of insulating and semiconducting materials

Evidence of a charge induced contribution to the sputtering yield of insulating and semiconducting materials

Eccles, A. J.; van den Berg, J. A.; Brown, A.; Vickerman, J. C.

期刊名称Applied Physics Letters
作者Eccles, A. J.; van den Berg, J. A.; Brown, A.; Vickerman, J. C.
卷第49卷
期第4期
印刷ISSN0003-6951
文件大小432.08KB
发表时间1986
DOI10.1063/1.97165

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