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Selective Embedded Growth of Al
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Ga
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1-
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As by Low-Pressure Organometallic Vapor Phase Epitaxy

Selective Embedded Growth of Al _x Ga _{1-
x} As by Low-Pressure Organometallic Vapor Phase Epitaxy

Kamon, Koichi; Takagishi, Shigenori; Mori, Hideki

期刊名称Japanese Journal of Applied Physics
作者Kamon, Koichi; Takagishi, Shigenori; Mori, Hideki
卷第25卷
印刷ISSN0021-4922
文件大小621.96KB
发表时间1986-1-20
DOI10.1143/jjap.25.l10

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