[IEEE 2014 International Conference on Optical MEMS and Nanophotonics (OMN) - Glasgow, UK (2014.8.17-2014.8.21)] 2014 International Conference on Optical MEMS and Nanophotonics - Tunable optical filters based on silicon nitride mem-branes with subwavelength gratingsWang, Yue; Stellinga, Daan; Krauss, Thomas F. · 2014