An integrated capacitive pressure sensor with frequency-modulated output
A. Hanneborg; T.-E. Hansen; P.A. Ohlckers; E. Carlson; B. Dahl; O. Holwech
- 作者A. Hanneborg; T.-E. Hansen; P.A. Ohlckers; E. Carlson; B. Dahl; O. Holwech
- 卷第9卷
- 期第4期
- 印刷ISSN0250-6874
- 文件大小747.58KB
- 发表时间1986
- DOI10.1016/0250-6874(86)80066-x
- 页码345-351