Damage profiles of MeV implants of Ga and Si in silicon

Amarendra K. Rai; John A. Baker; David C. Ingram; Anthony W. McCormick; David A. Walsh

作者Amarendra K. Rai; John A. Baker; David C. Ingram; Anthony W. McCormick; David A. Walsh
卷第21卷
印刷ISSN0168-583X
文件大小3537.58KB
发表时间1987
DOI10.1016/0168-583x(87)90879-2
页码466-470

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