Damage created in silicon by BFn+ (1≤ n ≤ 3) and PFn+ (1⪯ n:≤ 5) implantations
- 作者A. Grob; J.J. Grob; A. Golanski
- 印刷ISSN0168-583X
- 文件大小386.48KB
- 发表时间1987
- DOI10.1016/s0168-583x(87)80014-9
- 页码55-60
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