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Chemical erosion of amorphous hydrogenated carbon films by atomic and energetic hydrogen

Chemical erosion of amorphous hydrogenated carbon films by atomic and energetic hydrogen

E. Vietzke; K. Flaskamp; V. Philipps; G. Esser; P. Wienhold; J. Winter

作者E. Vietzke; K. Flaskamp; V. Philipps; G. Esser; P. Wienhold; J. Winter
印刷ISSN0022-3115
文件大小481.90KB
发表时间1987
DOI10.1016/0022-3115(87)90378-3
页码443-447

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