Organometallic route to the chemical vapor deposition of titanium carbide films at exceptionally low temperatures

Girolami, Gregory S.; Jensen, James A.; Pollina, Deborah M.; Allocca, Clare M.; Kaloyeros, Alain E.; Williams, Wendell S.

期刊名称Journal of the American Chemical Society
作者Girolami, Gregory S.; Jensen, James A.; Pollina, Deborah M.; Allocca, Clare M.; Kaloyeros, Alain E.; Williams, Wendell S.
卷第109卷
期第5期
印刷ISSN0002-7863
文件大小288.82KB
发表时间1987-03
DOI10.1021/ja00239a053
页码1579-1580

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