Ultrafine particles
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Hayashi, Chikara
- 卷第5卷
- 期第4期
- 印刷ISSN0734-2101
- 文件大小1787.93KB
- 发表时间1987-7
- DOI10.1116/1.574773
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